Invention Grant
- Patent Title: Substrate treatment apparatus and substrate treatment method
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Application No.: US15890434Application Date: 2018-02-07
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Publication No.: US10559480B2Publication Date: 2020-02-11
- Inventor: Koji Kurasaki , Kenji Edamitsu , Masaharu Sato , Kei Takechi , Takeshi Matsumura
- Applicant: SCREEN Holdings Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Ostrolenk Faber LLP
- Priority: JP2017-036442 20170228
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/02 ; C03C15/00 ; B08B3/04 ; B08B3/10 ; B08B3/08 ; G01N9/00 ; G01L11/00

Abstract:
A substrate treatment apparatus according to the present invention is provided with a first tank that stores treatment liquid for treating a substrate and a first path that returns the treatment liquid, which has spilled over from an upper part of the first tank, to a lower part of the first tank. A second path that branches from the first path, a measurement tank that stores the treatment liquid, which has flowed in from the second path, and a pressure measurement part that measures the pressure of the treatment liquid at a predetermined depth in the measurement tank in a state in which the treatment liquid spills over from an upper part of the measurement tank are provided. Therefore, techniques for highly precisely measuring the pressure of the treatment liquid used in treatment of substrates can be provided.
Public/Granted literature
- US20180247839A1 SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD Public/Granted day:2018-08-30
Information query
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