Invention Grant
- Patent Title: Substrate storage container
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Application No.: US15557720Application Date: 2016-02-22
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Publication No.: US10559484B2Publication Date: 2020-02-11
- Inventor: Katsuhiko Kato , Hiroshi Mimura , Masaru Hagano
- Applicant: SHIN-ETSU POLYMER CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU POLYMER CO., LTD.
- Current Assignee: SHIN-ETSU POLYMER CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Cowan, Liebowitz & Latman, P.C.
- Agent Mark Montague
- Priority: JP2015-080588 20150410
- International Application: PCT/JP2016/054974 WO 20160222
- International Announcement: WO2016/163166 WO 20161013
- Main IPC: H01L21/673
- IPC: H01L21/673 ; H01L21/683 ; G03F1/66

Abstract:
[Problem] To reduce a sliding trace in a vicinity of a substrate end surface, while maintaining smooth vertical movement of a substrate in a groove of the holding section in a substrate storage container, said sliding trace being made with the holding section.[Solution] The present invention relates to a substrate storage container (1) that is provided with: a container main body (2), which stores a substrate (W), and which has at least one side open; and a removable cover body (3) capable of opening/closing an opening (5) of the container main body (2). In the substrate storage container (1), the inside of the container main body (2) is provided with a first holding section (12) having a first holding groove (12a) for holding a rear portion of the substrate (W), the inner side of the cover body (3) is provided with a second holding section (25) having a second holding groove (25a) for holding a front portion of the substrate (W), and at least the first holding groove (12a) of the first holding section (12) is configured from an alloy resin having a polycarbonate resin and a polybutylene terephthalate resin as main components.
Public/Granted literature
- US20180068882A1 SUBSTRATE STORAGE CONTAINER Public/Granted day:2018-03-08
Information query
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