Invention Grant
- Patent Title: Method for polymer-assisted chip transfer
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Application No.: US15867400Application Date: 2018-01-10
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Publication No.: US10559486B1Publication Date: 2020-02-11
- Inventor: Daniel Brodoceanu , Pooya Saketi , Oscar Torrents Abad , Allan Pourchet , Patrick Joseph Hughes , Karsten Moh
- Applicant: Facebook Technologies, LLC
- Applicant Address: US CA Menlo Park
- Assignee: Facebook Technologies, LLC
- Current Assignee: Facebook Technologies, LLC
- Current Assignee Address: US CA Menlo Park
- Agency: Fenwick & West LLP
- Main IPC: H01L21/683
- IPC: H01L21/683 ; B32B38/10 ; H01L33/00 ; B32B7/12 ; H01L33/32 ; B32B37/12

Abstract:
One or more chips are transferred from one substrate to another by using one or more polymer layers to secure the one or more chips to an intermediate carrier substrate. While secured to the intermediate carrier substrate, the one or more chips may be transported or put through further processing or fabrication steps. To release the one or more chips, the adhesion strength of the one or more polymer layers is gradually reduced to minimize potential damage to the one or more chips.
Information query
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