Invention Grant
- Patent Title: Two-level tape frame rinse assembly
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Application No.: US15670578Application Date: 2017-08-07
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Publication No.: US10559488B2Publication Date: 2020-02-11
- Inventor: William Gilbert Breingan , John Taddei , James Swallow
- Applicant: VEECO PRECISION SURFACE PROCESSING LLC
- Applicant Address: US PA Horsham
- Assignee: VEECO PRECISION SURFACE PROCESSING LLC
- Current Assignee: VEECO PRECISION SURFACE PROCESSING LLC
- Current Assignee Address: US PA Horsham
- Agency: Leason Ellis LLP
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01L21/67 ; H01L21/687 ; H01L21/02
Abstract:
A two-level tape frame rinse assembly is configured for grasping the substrate so as to create a gap between the substrate and a backside support plate that allows the backside of the wafer to be rinsed and spun dry after rinsing.
Public/Granted literature
- US20180047612A1 Two-level Tape Frame Rinse Assembly Public/Granted day:2018-02-15
Information query
IPC分类:
