Invention Grant
- Patent Title: Protective film-forming film, sheet for forming protective film, complex sheet for forming protective film, and inspection method
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Application No.: US15112940Application Date: 2015-01-21
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Publication No.: US10559505B2Publication Date: 2020-02-11
- Inventor: Daisuke Yamamoto , Hiroyuki Yoneyama
- Applicant: Lintec Corporation
- Applicant Address: JP Tokyo
- Assignee: Lintec Corporation
- Current Assignee: Lintec Corporation
- Current Assignee Address: JP Tokyo
- Agent Christopher Casieri
- Priority: JP2014-009243 20140122
- International Application: PCT/JP2015/051567 WO 20150121
- International Announcement: WO2015/111632 WO 20150730
- Main IPC: H01L23/29
- IPC: H01L23/29 ; H01L21/66 ; C09J7/00 ; C09J133/10

Abstract:
Provided is a sheet (2) for forming protective film, including: a protective film-forming film (1) characterized in that the light transmittance thereof at a wavelength of 1600 nm of 72% or more, and the light transmittance thereof at a wavelength of 550 nm of 20% or less; and a release sheet (21) laminated upon one or both faces of the protective film-forming film (1). According to this sheet (2) for forming a protective film, it is possible to form a protective film that allows for the inspection of cracks, etc., on a workpiece or a product obtained by processing the workpiece, while preventing grinding marks on the workpiece or the product from being visible to the naked eye.
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