• Patent Title: Protective film-forming film, sheet for forming protective film, complex sheet for forming protective film, and inspection method
  • Application No.: US15112940
    Application Date: 2015-01-21
  • Publication No.: US10559505B2
    Publication Date: 2020-02-11
  • Inventor: Daisuke YamamotoHiroyuki Yoneyama
  • Applicant: Lintec Corporation
  • Applicant Address: JP Tokyo
  • Assignee: Lintec Corporation
  • Current Assignee: Lintec Corporation
  • Current Assignee Address: JP Tokyo
  • Agent Christopher Casieri
  • Priority: JP2014-009243 20140122
  • International Application: PCT/JP2015/051567 WO 20150121
  • International Announcement: WO2015/111632 WO 20150730
  • Main IPC: H01L23/29
  • IPC: H01L23/29 H01L21/66 C09J7/00 C09J133/10
Protective film-forming film, sheet for forming protective film, complex sheet for forming protective film, and inspection method
Abstract:
Provided is a sheet (2) for forming protective film, including: a protective film-forming film (1) characterized in that the light transmittance thereof at a wavelength of 1600 nm of 72% or more, and the light transmittance thereof at a wavelength of 550 nm of 20% or less; and a release sheet (21) laminated upon one or both faces of the protective film-forming film (1). According to this sheet (2) for forming a protective film, it is possible to form a protective film that allows for the inspection of cracks, etc., on a workpiece or a product obtained by processing the workpiece, while preventing grinding marks on the workpiece or the product from being visible to the naked eye.
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