Invention Grant
- Patent Title: Indirect readout FET
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Application No.: US16360690Application Date: 2019-03-21
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Publication No.: US10559562B2Publication Date: 2020-02-11
- Inventor: Jin-Ping Han , Yulong Li , Dennis M. Newns , Paul M. Solomon , Xiao Sun
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: H01L27/06
- IPC: H01L27/06 ; H01L27/1159 ; H01L21/28 ; H01L27/11507 ; H01L29/06 ; H01L29/49 ; H01L29/51

Abstract:
A metal-insulator-metal (MIM) capacitor structure includes source and drain regions formed within a semiconductor substrate, a first conducting layer formed over the source and drain regions, and a dielectric layer formed over the first conducting layer. The MIM capacitor structure further includes a second conducting layer formed over the dielectric layer, and a sidewall dielectric formed adjacent the first conducting layer and the dielectric layer. An electric field is created indirectly through the sidewall dielectric to an adjacent field effect transistor (FET) channel in the semiconductor substrate.
Public/Granted literature
- US20190221559A1 INDIRECT READOUT FET Public/Granted day:2019-07-18
Information query
IPC分类: