Invention Grant
- Patent Title: Field-effect transistors with a grown silicon-germanium channel
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Application No.: US16102066Application Date: 2018-08-13
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Publication No.: US10559593B1Publication Date: 2020-02-11
- Inventor: Carsten Metze , Berthold Reimer , Simeon Morvan
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L21/02 ; H01L21/8234 ; H01L21/321 ; H01L21/324 ; H01L21/762

Abstract:
Structures for a field-effect transistor and methods of forming a structure for a field-effect transistor. A first channel region containing a first semiconductor material and a second channel region containing a second semiconductor material are formed over a buried insulating layer of a silicon-on-insulator substrate. A first gate electrode of a first field-effect transistor is formed over the first channel region. A second gate electrode of a second field-effect transistor is formed over the second channel region. The first semiconductor material of the first channel region has a first germanium concentration. The second semiconductor material of the second channel region has a second germanium concentration that is greater than the first germanium concentration in the first semiconductor material of the first channel region.
Public/Granted literature
- US20200051808A1 FIELD-EFFECT TRANSISTORS WITH A GROWN SILICON-GERMANIUM CHANNEL Public/Granted day:2020-02-13
Information query
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