Invention Grant
- Patent Title: Silicon carbide semiconductor device and method for manufacturing silicon carbide semiconductor device
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Application No.: US16307184Application Date: 2017-05-23
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Publication No.: US10559653B2Publication Date: 2020-02-11
- Inventor: Tomokatsu Watanabe , Shiro Hino , Yusuke Yamashiro , Toshiaki Iwamatsu
- Applicant: Mitsubishi Electric Corporation
- Applicant Address: JP Chiyoda-ku
- Assignee: Mitsubishi Electric Corporation
- Current Assignee: Mitsubishi Electric Corporation
- Current Assignee Address: JP Chiyoda-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2016-143086 20160721
- International Application: PCT/JP2017/019209 WO 20170523
- International Announcement: WO2018/016171 WO 20180125
- Main IPC: H01L31/0312
- IPC: H01L31/0312 ; H01L29/06 ; H01L29/872 ; H01L21/20 ; H01L21/265 ; H01L29/78 ; H01L29/12 ; H01L21/02 ; H01L21/04 ; H01L29/10 ; H01L29/16 ; H01L29/66 ; H01L29/739

Abstract:
The technique disclosed in the Description relates to a technique preventing dielectric breakdown while a silicon carbide semiconductor device is OFF, without degrading process throughput or yield. The silicon carbide semiconductor device relating to the technique disclosed in the Description includes a drift layer of a first conductivity type, a threading dislocation provided to penetrate the drift layer, and an electric-field reduction region of a second conductivity type disposed in a position in the surface layer of the drift layer, the position corresponding to the threading dislocation. The electric-field reduction region is an epitaxial layer.
Public/Granted literature
- US20190131388A1 SILICON CARBIDE SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SILICON CARBIDE SEMICONDUCTOR DEVICE Public/Granted day:2019-05-02
Information query
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