Silicon carbide semiconductor device and method for manufacturing silicon carbide semiconductor device
Abstract:
The technique disclosed in the Description relates to a technique preventing dielectric breakdown while a silicon carbide semiconductor device is OFF, without degrading process throughput or yield. The silicon carbide semiconductor device relating to the technique disclosed in the Description includes a drift layer of a first conductivity type, a threading dislocation provided to penetrate the drift layer, and an electric-field reduction region of a second conductivity type disposed in a position in the surface layer of the drift layer, the position corresponding to the threading dislocation. The electric-field reduction region is an epitaxial layer.
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