Invention Grant
- Patent Title: Method of fabricating an enhancement mode group III-nitride HEMT device and a group III-nitride structure fabricated therefrom
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Application No.: US15353952Application Date: 2016-11-17
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Publication No.: US10559677B2Publication Date: 2020-02-11
- Inventor: Shuzhen You , Niels Posthuma
- Applicant: IMEC VZW
- Applicant Address: BE Leuven
- Assignee: IMEC VZW
- Current Assignee: IMEC VZW
- Current Assignee Address: BE Leuven
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Priority: EP15201152 20151218
- Main IPC: H01L29/778
- IPC: H01L29/778 ; H01L21/02 ; H01L21/306 ; H01L29/20 ; H01L29/205 ; H01L29/423 ; H01L29/66 ; H01L29/10

Abstract:
The disclosure relates to a method of fabricating an enhancement mode Group III-nitride HEMT device and a Group III-nitride structure fabricated therefrom. One example embodiment is a method for fabricating an enhancement mode Group III-nitride HEMT device. The method includes providing a structure. The structure includes a substrate having a main surface. The structure also includes a layer stack overlying the main surface. Each layer of the layer stack includes a Group III-nitride material. The structure further includes a capping layer on the layer stack. The method also includes forming a recessed gate region by removing, in a gate region, at least the capping layer by performing an etch process, thereby exposing a top surface of an upper layer of the layer stack. The method further includes forming a p-type doped GaN layer in the recessed gate region and on the capping layer by performing a non-selective deposition process.
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