Invention Grant
- Patent Title: Vertical transistor having dual work function materials and method for fabricating thereof
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Application No.: US15916729Application Date: 2018-03-09
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Publication No.: US10559684B2Publication Date: 2020-02-11
- Inventor: Zhaoxu Shen , Duohui Bei
- Applicant: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION , SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
- Applicant Address: CN Shanghai CN Beijing
- Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION,SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
- Current Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION,SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
- Current Assignee Address: CN Shanghai CN Beijing
- Agency: Kilpatrick Townsend & Stockton LLP
- Priority: CN201710222212 20170407
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L21/8238 ; H01L21/8234 ; H01L29/06

Abstract:
A semiconductor device includes a substrate, a semiconductor column vertically disposed on the substrate, a first contact material layer on the substrate and in contact with a lower portion of the semiconductor column, a first insulating material layer on the first contact material layer and having an upper surface lower than an upper surface of the semiconductor column, a gate dielectric material layer on the first insulating material layer and on a portion of sidewalls of the semiconductor column while exposing an upper portion of the semiconductor column, and a gate stack structure on the gate dielectric material layer and surrounding a portion of the gate dielectric material layer on the sidewalls of the semiconductor column. The gate stack structure includes from inside to outside a P-type work function layer, an N-type work function layer, and a gate.
Public/Granted literature
- US20180294351A1 VERTICAL TRANSISTOR HAVING DUAL WORK FUNCTION MATERIALS AND METHOD FOR FABRICATING THEREOF Public/Granted day:2018-10-11
Information query
IPC分类: