Invention Grant
- Patent Title: In-plane resonant-cavity infrared photodetectors with fully-depleted absorbers
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Application No.: US16167729Application Date: 2018-10-23
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Publication No.: US10559704B2Publication Date: 2020-02-11
- Inventor: Jerry R. Meyer , Igor Vurgaftman , Chadwick Lawrence Canedy , William W. Bewley , Chul Soo Kim , Charles D. Merritt , Michael V. Warren , Mijin Kim
- Applicant: The Government of the United States of America, as represented by the Secretary of the Navy
- Applicant Address: US DC Washington
- Assignee: The Government of the United States of America, as represented by the Secretary of the Navy
- Current Assignee: The Government of the United States of America, as represented by the Secretary of the Navy
- Current Assignee Address: US DC Washington
- Agency: US Naval Research Laboratory
- Agent Joslyn Barritt
- Main IPC: H01L31/105
- IPC: H01L31/105 ; G01N21/00 ; G01N21/552 ; H01L31/0232 ; H01L31/0304 ; H01L31/109 ; G02B6/124 ; G02B6/12 ; H01L31/0352 ; G01N21/3504 ; G01N21/77

Abstract:
Resonant-cavity infrared photodetector (RCID) devices that include a thin absorber layer contained entirely within the resonant cavity. In some embodiments, the absorber is a single type-II InAs—GaSb interface situated between an AlSb/InAs superlattice n-type region and a p-type AlSb/GaSb region. In other embodiments, the absorber region comprises quantum wells formed on an upper surface of the n-type region. In other embodiments, the absorber region comprises a “W”-structured quantum well situated between two barrier layers, the “W”-structured quantum well comprising a hole quantum well sandwiched between two electron quantum wells. In other embodiments, the RCID includes a thin absorber region and an nBn or pBp active core within a resonant cavity. In some embodiments, the RCID is configured to absorb incident light propagating in the direction of the epitaxial growth of the RCID structure, while in other embodiments, it absorbs light propagating in the epitaxial plane of the structure.
Public/Granted literature
- US20190148569A1 In-Plane Resonant-Cavity Infrared Photodetectors with Fully-Depleted Absorbers Public/Granted day:2019-05-16
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