Invention Grant
- Patent Title: Mapping of measurement data to production tool location and batch or time of processing
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Application No.: US15520831Application Date: 2015-10-20
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Publication No.: US10559709B2Publication Date: 2020-02-11
- Inventor: Gregory Ayres , Steven McDonald
- Applicant: Aurora Solar Technologies (Canada) Inc.
- Applicant Address: unknown North Vancouver, BC
- Assignee: Aurora Solar Technologies (Canada) Inc.
- Current Assignee: Aurora Solar Technologies (Canada) Inc.
- Current Assignee Address: unknown North Vancouver, BC
- Agency: Morgan, Lewis & Bockius LLP
- International Application: PCT/CA2015/051051 WO 20151020
- International Announcement: WO2016/061671 WO 20160428
- Main IPC: H01L31/18
- IPC: H01L31/18 ; H01L31/04

Abstract:
The present invention provides methods and systems for manufacturing process control of photovoltaic products. Some embodiments relate to a method for tracking wafers for photovoltaic products with respect to which production tool processed them and their position within that production tool. Some embodiments relate to measuring and characterizing the critical-to-quality parameters of the partially-finished photovoltaic products emerging from the production tool in question. Some embodiments relate to display and visualization of the measured parameters on a computer screen, such that the parameters of each production unit can be directly observed in the context of which production tools processed them, which location within a specific production tool they were located in during processing, and which batch, or in the case of continuous processing, what time, the unit(s) was/where processed.
Public/Granted literature
- US20180006185A1 Mapping Of Measurement Data To Production Tool Location And Batch Or Time Of Processing Public/Granted day:2018-01-04
Information query
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