Invention Grant
- Patent Title: Microelectromechanical microphone
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Application No.: US16052261Application Date: 2018-08-01
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Publication No.: US10560771B2Publication Date: 2020-02-11
- Inventor: Alfons Dehe , Gerhard Metzger-Brueckl , Johann Strasser , Arnaud Walther , Andreas Wiesbauer
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Priority: DE102017118857 20170818
- Main IPC: H04R1/06
- IPC: H04R1/06 ; H04R1/08 ; B81B3/00 ; B81C1/00 ; H04R23/00 ; H04R31/00

Abstract:
In accordance with an embodiment, microelectromechanical microphone includes a holder and a sound detection unit carried on the holder. The sound detection unit includes a planar first membrane, a planar second membrane arranged at a distance from the first membrane, a low-pressure chamber formed between the first membrane and the second membrane, a reduced gas pressure relative to normal pressure being present in the low-pressure chamber, a reference electrode arranged at least in sections in the low-pressure chamber, where the first and second membranes are displaceable relative to the reference electrode by sound waves to be detected, the reference electrode includes a planar base section and a stiffening structure provided on the base section, and the stiffening structure is provided on a side of the base section that faces the first membrane or/and on a side of the base section that faces the second membrane.
Public/Granted literature
- US20190058936A1 MICROELECTROMECHANICAL MICROPHONE Public/Granted day:2019-02-21
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