Holding nozzle, holding head and transportation apparatus
Abstract:
A holding nozzle is provided with a suction member including a suction portion which comes into contact with a panel and a shaft portion communicated with the suction portion, an accommodation portion in which the shaft portion is accommodated, a suction member support portion supporting the shaft portion such that the suction member is movable with respect to the accommodation portion, a negative pressure connection portion to which a negative pressure generator is connected, and a communication member accommodated in the accommodation portion between the negative pressure connection portion and the suction member support portion and has a hollow portion which is a portion of a flow path through which a fluid is flowed. The communication member includes a first connection portion connected to the negative pressure connection portion, a second connection portion connected to the shaft portion, and a contractible portion installed between the first and second connection portions.
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