Invention Grant
- Patent Title: Support pillar
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Application No.: US15652920Application Date: 2017-07-18
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Publication No.: US10562759B2Publication Date: 2020-02-18
- Inventor: Chien-Chang Chen , Yi-Der Liang , Shiao-Yi Lin , Cheng-Kuang Yang
- Applicant: Foresee Technology Corp.
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: TW104115514A 20150515; TW104207483U 20150515; TW104210954U 20150707; TW104214023U 20150828
- Main IPC: H01L29/84
- IPC: H01L29/84 ; B81B3/00 ; B81C1/00 ; H04R19/00 ; H04R19/04

Abstract:
The present invention disclosed a micro acoustic collector and CMOS microphone single chip. The micro acoustic collector comprising: a plurality of leaf-shaped structures annularly arranged with symmetry, each of the plurality of leaf-shaped structure having a suspended arm and a restrained arm, and the suspended arm of the plurality of leaf-shaped structures connected to a suspended fulcrum, and a plurality of through-vias formed in the suspended fulcrum and the plurality of leaf-shaped structures; a plurality of support pillars uniformly disposed under edges of the plurality of leaf-shaped structures corresponding to the restrained arms and the suspend arms; and a base metal layer formed under and insulated from the plurality of support pillars, and facing towards the inner-annular-supported acoustic collection film to form a hollow space.
Public/Granted literature
- US20170313575A1 SUPPORT PILLAR Public/Granted day:2017-11-02
Information query
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