Invention Grant
- Patent Title: Support pillar
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Application No.: US15652960Application Date: 2017-07-18
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Publication No.: US10562760B2Publication Date: 2020-02-18
- Inventor: Chien-Chang Chen , Yi-Der Liang , Shiao-Yi Lin , Cheng-Kuang Yang
- Applicant: Foresee Technology Corp.
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: TW104115514A 20150515; TW104207483U 20150515; TW104210954U 20150707; TW104214023U 20150828
- Main IPC: H01L29/84
- IPC: H01L29/84 ; B81B3/00 ; B81C1/00 ; H04R19/00 ; H04R19/04
Abstract:
The present invention disclosed a micro acoustic collector with a lateral cavity, comprising: a base metal layer; a movable film, an annular side wall; a lateral metal layer. The movable film faces towards the base metal layer to form a hollow space. The lateral metal layer is formed at a side of the movable film and around the movable film, fixed by the annular side wall and spaced apart from peripheral of the movable film by a distance, and the lateral metal layer faces towards the base metal layer to form a lateral cavity to assist an acoustic collection.
Public/Granted literature
- US20170313576A1 SUPPORT PILLAR Public/Granted day:2017-11-02
Information query
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