- Patent Title: Physical quantity sensor, electronic apparatus, and moving object
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Application No.: US15086231Application Date: 2016-03-31
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Publication No.: US10563983B2Publication Date: 2020-02-18
- Inventor: Tsugio Ide
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2015-081499 20150413
- Main IPC: G01C19/5783
- IPC: G01C19/5783 ; G01C19/5642

Abstract:
A physical quantity sensor includes: an angular velocity detection element; an acceleration detection element; a bonding wire through which a detection signal of the acceleration detection element propagates; and a shield unit that is located between the angular velocity detection element and the bonding wire and is connected to a fixed potential. The angular velocity detection element and the acceleration detection element are disposed to be deviated in a height direction. At least a part of the shield unit is disposed between the angular velocity detection element and the acceleration detection element.
Public/Granted literature
- US20160298964A1 PHYSICAL QUANTITY SENSOR, ELECTRONIC APPARATUS, AND MOVING OBJECT Public/Granted day:2016-10-13
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