Invention Grant
- Patent Title: Optical and electromechanical resonator
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Application No.: US16145806Application Date: 2018-09-28
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Publication No.: US10564092B2Publication Date: 2020-02-18
- Inventor: Leopold Virot , Vincent Agache , Jean-Marc Fedeli , Sebastien Hentz
- Applicant: Commissariat a l'energie atomique et aux energies alternatives
- Applicant Address: FR Paris
- Assignee: Commissariat a l'energie atomique et aux energies alternatives
- Current Assignee: Commissariat a l'energie atomique et aux energies alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1759115 20170929
- Main IPC: G01N21/17
- IPC: G01N21/17 ; G01G17/04 ; G01N21/25 ; G02B6/42 ; H03H9/17

Abstract:
The invention is an electromechanical resonator, comprising a fixed portion and an oscillator oscillating at a resonant frequency and comprising a fluidic channel. The channel defines a fluidic circuit, can receive a fluid, and can be deformed at the resonant frequency. The resonator includes a waveguide, defining a photonic circuit, guiding a light wave between an input and an output of the waveguide and being able to be deformed at the resonant frequency. The waveguide input can be connected to a light source and the waveguide output can be connected to a photodetector able to form a signal representative of the light wave propagated by the waveguide towards the photodetector, the light wave being modulated at a frequency dependent on the resonant frequency. A variation in a mass of the fluid, inducing a variation in the resonant frequency, may be detected via the signal formed by the photodetector.
Public/Granted literature
- US20190101488A1 OPTICAL AND ELECTROMECHANICAL RESONATOR Public/Granted day:2019-04-04
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