Invention Grant
- Patent Title: Measurement device and measurement method
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Application No.: US15713841Application Date: 2017-09-25
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Publication No.: US10564265B2Publication Date: 2020-02-18
- Inventor: Takahiro Inoue , Satoshi Yanobe , Hideyuki Matsumoto , Fumio Ohtomo
- Applicant: Topcon Corporation
- Applicant Address: JP Itabashi-ku, Tokyo
- Assignee: Topcon Corporation
- Current Assignee: Topcon Corporation
- Current Assignee Address: JP Itabashi-ku, Tokyo
- Agency: Chiesa Shahinian & Giantomasi PC
- Priority: JP2016-192895 20160930
- Main IPC: G01S7/481
- IPC: G01S7/481 ; G01S17/02 ; G01C3/08 ; G01S17/89 ; G01B21/22 ; G01C15/00 ; G01C1/04 ; G01B21/04

Abstract:
A measurement device and measurement method are provided which are capable of measuring the inclination of a measurement target object surface both with a simple configuration and at high speed. The measurement device includes: a rangefinding light emitting section; a rangefinding unit configured to receive reflected rangefinding light; an optical axis deflection section provided on an optical path common to rangefinding light and reflected rangefinding light, and configured to deflect optical axes thereof; a motor configured to cause the optical axis deflection section to rotate; an emission direction detection unit configured to detect a deflection angle and deflection direction resulting from the optical axis deflection section; and a computation controller that measures the inclination of a measurement target object surface with respect to the emission optical axis on the basis of acquired coordinate data on the measurement target object surface.
Public/Granted literature
- US20180095166A1 MEASUREMENT DEVICE AND MEASUREMENT METHOD Public/Granted day:2018-04-05
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