Invention Grant
- Patent Title: Heterogeneous integrated circuit for short wavelengths
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Application No.: US15902753Application Date: 2018-02-22
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Publication No.: US10564356B2Publication Date: 2020-02-18
- Inventor: Daniel N. Carothers
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Lewis Roca Rothgerber Christie LLP
- Main IPC: G02B6/136
- IPC: G02B6/136 ; H01L31/18 ; H01L31/0304 ; H01L31/0232 ; H01L31/0352

Abstract:
A heterogeneous semiconductor structure, including a first integrated circuit and a second integrated circuit, the second integrated circuit being a photonic integrated circuit. The heterogeneous semiconductor structure may be fabricated by bonding a multi-layer source die, in a flip-chip manner, to the first integrated circuit, removing the substrate of the source die, and fabricating one or more components on the source die, using etch and/or deposition processes, to form the second integrated circuit. The second integrated circuit may include components fabricated from cubic phase gallium nitride compounds, and configured to operate at wavelengths shorter than 450 nm.
Public/Granted literature
- US20190146154A1 HETEROGENEOUS INTEGRATED CIRCUIT FOR SHORT WAVELENGTHS Public/Granted day:2019-05-16
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