Invention Grant
- Patent Title: Method of forming crystalline ITO thin film and method of forming on-cell type touch panel
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Application No.: US15576024Application Date: 2017-10-12
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Publication No.: US10564461B2Publication Date: 2020-02-18
- Inventor: Shaoqing Lv
- Applicant: WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD
- Applicant Address: CN Wuhan, Hubei
- Assignee: Wuhan China Star Optoelectronics Technology Co., Ltd.
- Current Assignee: Wuhan China Star Optoelectronics Technology Co., Ltd.
- Current Assignee Address: CN Wuhan, Hubei
- Agency: Mintz Levin Cohn Ferris Glovsky and Popeo, P.C.
- Agent Steven M. Jensen
- Priority: CN201710842690 20170918
- International Application: PCT/CN2017/105812 WO 20171012
- International Announcement: WO2019/051913 WO 20190321
- Main IPC: G02F1/1333
- IPC: G02F1/1333 ; C23C14/35 ; C23C14/08 ; C23C14/58 ; G06F3/041 ; G06F3/044

Abstract:
The present disclosure provides a method of forming a crystalline ITO thin film for forming the crystalline ITO thin film on a liquid crystal panel and a method of forming an On-cell type touch panel by using the method of forming a crystalline ITO thin film. The method of forming a crystalline ITO thin film includes: forming a noncrystalline ITO thin film on a surface of a side of a color filter substrate being far away from the liquid crystal layer, by a deposition process; and crystallizing the noncrystalline ITO thin film by an excimer laser anneal process at a preset temperature so as to obtain the crystalline ITO thin film.
Public/Granted literature
- US20190086704A1 METHOD OF FORMING CRYSTALLINE ITO THIN FILM AND METHOD OF FORMING ON-CELL TYPE TOUCH PANEL Public/Granted day:2019-03-21
Information query
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