Invention Grant
- Patent Title: Photoresist composition
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Application No.: US15591439Application Date: 2017-05-10
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Publication No.: US10564544B2Publication Date: 2020-02-18
- Inventor: Tatsuro Masuyama , Koji Ichikawa
- Applicant: SUMITOMO CHEMICAL COMPANY, LIMITED
- Applicant Address: JP Tokyo
- Assignee: SUMITOMO CHEMICAL COMPANY, LIMITED
- Current Assignee: SUMITOMO CHEMICAL COMPANY, LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2016-097199 20160513
- Main IPC: G03F7/038
- IPC: G03F7/038 ; C08F220/18 ; C08F220/22 ; C08F220/28 ; G03F7/004 ; G03F7/16 ; G03F7/20 ; G03F7/32 ; G03F7/38

Abstract:
A photoresist composition comprising an acid generator and a resin which comprises one or more structural units (a1) derived from a monomer (a1) having an acid-liable group, all of monomers (a1) showing a distance of Hansen solubility parameters between the monomer (a1) and butyl acetate in the range of 3 to 5, the distance being calculated from formula (1): R=(4×(δdm−15.8)2+(δpm−3.7)2+(δhm−6.3)2)1/2 (1) in which δdm represents a dispersion parameter of a monomer, δpm represents a polarity parameter of a monomer, δhm represents a hydrogen bonding parameter of a monomer, and R represents a distance of Hansen solubility parameters, and at least one of the monomers (a1) showing a difference of R between the monomer (a1) and a compound in which an acid is removed from the monomer (a1) in the range of not less than 5.
Public/Granted literature
- US20170329223A1 PHOTORESIST COMPOSITION Public/Granted day:2017-11-16
Information query
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