Invention Grant
- Patent Title: Controller for treatment of semiconductor processing equipment effluent
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Application No.: US14829659Application Date: 2015-08-19
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Publication No.: US10564609B2Publication Date: 2020-02-18
- Inventor: Ronald Vern Schauer
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: G05B9/02
- IPC: G05B9/02
Abstract:
Embodiments disclosed herein include a controller for a treatment system for lessening the hazard of effluents produced in a processing system.
Public/Granted literature
- US20160077508A1 CONTROLLER FOR TREATMENT OF SEMICONDUCTOR PROCESSING EQUIPMENT EFFLUENT Public/Granted day:2016-03-17
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