Invention Grant
- Patent Title: DVC utilizing MEMS resistive switches and MIM capacitors
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Application No.: US14904855Application Date: 2014-08-01
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Publication No.: US10566140B2Publication Date: 2020-02-18
- Inventor: Richard L. Knipe , Charles G. Smith , Roberto Gaddi , Robertus Petrus Van Kampen
- Applicant: CAVENDISH KINETICS, INC.
- Applicant Address: US CA San Jose
- Assignee: CAVENDISH KINETICS, INC.
- Current Assignee: CAVENDISH KINETICS, INC.
- Current Assignee Address: US CA San Jose
- Agency: Patterson & Sheridan, LLP
- Agent Steven Versteeg
- International Application: PCT/US2014/049329 WO 20140801
- International Announcement: WO2015/017743 WO 20150205
- Main IPC: H01G5/00
- IPC: H01G5/00 ; H01G5/40 ; H01H59/00 ; H01G5/38 ; H01G5/18 ; H01G5/16 ; H01L49/02
Abstract:
The present invention generally relates to a MEMS DVC utilizing one or more MIM capacitors. The MIM capacitor may be disposed between the MEMS device and the RF pad or the MIM capacitor may be integrated into the MEMS device itself. The MIM capacitor ensures that a low resistance for the MEMS DVC is achieved.
Public/Granted literature
- US20160172112A1 DVC UTILIZING MEMS RESISTIVE SWITCHES AND MIM CAPACITORS Public/Granted day:2016-06-16
Information query
