Invention Grant
- Patent Title: Polycrystalline ceramic substrate
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Application No.: US16161853Application Date: 2018-10-16
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Publication No.: US10566190B2Publication Date: 2020-02-18
- Inventor: Vladimir Odnoblyudov , Cem Basceri , Shari Farrens
- Applicant: QROMIS, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Qromis, Inc.
- Current Assignee: Qromis, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L33/00 ; C23C16/50 ; H01L21/84 ; H01L27/12 ; H01L33/02 ; C23C16/40 ; C23C16/56 ; C30B29/06 ; C30B29/40
Abstract:
A method of fabricating a ceramic substrate structure includes providing a ceramic substrate, encapsulating the ceramic substrate in a barrier layer, and forming a bonding layer coupled to the barrier layer. The method further includes removing a portion of the bonding layer to expose at least a portion of the barrier layer and define fill regions, and depositing a second bonding layer on the at least a portion of the exposed barrier layer and the fill regions.
Public/Granted literature
- US20190115208A1 POLYCRYSTALLINE CERAMIC SUBSTRATE AND METHOD OF MANUFACTURE Public/Granted day:2019-04-18
Information query
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