Invention Grant
- Patent Title: Local wiring in between stacked devices
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Application No.: US16238142Application Date: 2019-01-02
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Publication No.: US10566247B2Publication Date: 2020-02-18
- Inventor: Effendi Leobandung
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Ryan, Mason & Lewis, LLP
- Agent L. Jeffrey Kelly
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L23/535 ; H01L27/092 ; H01L25/065 ; H01L29/423 ; H01L21/02 ; H01L21/8234 ; H01L29/66 ; H01L29/786 ; H01L29/78 ; H01L21/768 ; H01L21/306 ; H01L21/28

Abstract:
Semiconductor devices and methods are provided to fabricate field effect transistor (FET) devices having local wiring between the stacked devices. For example, a semiconductor device includes a first FET device on a semiconductor substrate, the FET device comprising a first source/drain layer, and a first gate structure comprising a gate dielectric layer and a metal gate layer. The semiconductor device further includes a second FET device comprising a second source/drain layer, and a second gate structure comprising a gate dielectric layer and a metal gate layer; wherein the first and second FET devices are in a stacked configuration. The semiconductor device further includes one or more conductive vias in communication with either the first gate structure of the first FET device or the second gate structure of the second FET device.
Public/Granted literature
- US20190214313A1 LOCAL WIRING IN BETWEEN STACKED DEVICES Public/Granted day:2019-07-11
Information query
IPC分类: