Invention Grant
- Patent Title: Testing method for testing wafer level chip scale packages
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Application No.: US15862218Application Date: 2018-01-04
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Publication No.: US10566256B2Publication Date: 2020-02-18
- Inventor: Kuan-Chung Chen , Cheng-Hui Lin , Chia-Pin Sun
- Applicant: WINWAY TECHNOLOGY CO., LTD.
- Applicant Address: TW Kaohsiung
- Assignee: WINWAY TECHNOLOGY CO., LTD.
- Current Assignee: WINWAY TECHNOLOGY CO., LTD.
- Current Assignee Address: TW Kaohsiung
- Agency: Muncy, Geissler, Olds & Lowe, PC
- Main IPC: G01R1/06
- IPC: G01R1/06 ; H01L21/66 ; H01L21/683 ; H01L23/00 ; G01R31/28 ; G01R1/073 ; G01R1/067

Abstract:
A testing method for testing wafer level chip scale packages formed on a wafer including a wafer substrate and spaced-apart contact electrodes disposed on the wafer substrate, includes: providing a test device including a probe card formed with a plurality of parallel probe holes having a uniform cross-sectional dimension, and a plurality of probes respectively received in the probe holes and extending respectively in the probe holes along axes of the probe holes; and electrically connecting the contact electrodes to the probes. A distance between the axes of two adjacent ones of the probe holes is equal to a smallest spacing between two adjacent ones of the contact electrodes and is not greater than 0.5 mm.
Public/Granted literature
- US20190206750A1 TESTING METHOD FOR TESTING WAFER LEVEL CHIP SCALE PACKAGES Public/Granted day:2019-07-04
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