A semiconductor device includes a plurality of stacked chips is disclosed. Each of the stacked chips includes a plurality of through vias arranged in a regular polygonal shape. The through vias of each chip are formed at corresponding positions in a stacked direction. The respective through vias of each chip are electrically connected to through vias of a chip adjacent in the stacked direction in a manner that the connected through vias are spaced apart from one another in substantially the same direction.