Invention Grant
- Patent Title: Semiconductor devices
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Application No.: US16192097Application Date: 2018-11-15
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Publication No.: US10566332B2Publication Date: 2020-02-18
- Inventor: Kuo-Chen Wang , Shih-Fan Kuan , Lars Heineck , Sanh D. Tang
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L21/027 ; H01L21/3105 ; H01L21/311 ; H01L21/762 ; H01L23/522 ; H01L23/528 ; H01L23/532 ; H01L29/06

Abstract:
A semiconductor memory device includes a semiconductor substrate having active areas and a trench isolation region between the active areas. The active areas extend along a first direction. Buried word lines extend along a second direction in the semiconductor substrate. Two of the buried word lines intersect with each of the active areas, separating each of the active areas into a digit line contact area and two cell contact areas. The second direction is not perpendicular to the first direction. A digit line contact is disposed on the digit line contact area. A storage node contact is disposed on each of the two cell contact areas. The digit line contact and the storage node contact are coplanar. At least one digit line extends along a third direction over a main surface of the semiconductor substrate. The at least one digit line is in direct contact with the digit line contact.
Public/Granted literature
- US20190088658A1 SEMICONDUCTOR DEVICES Public/Granted day:2019-03-21
Information query
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