Invention Grant
- Patent Title: Three-dimensional memory devices having through array contacts and methods for forming the same
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Application No.: US16149103Application Date: 2018-10-01
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Publication No.: US10566336B1Publication Date: 2020-02-18
- Inventor: Mei Lan Guo , Yushi Hu , Ji Xia , Hongbin Zhu
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: Bayes PLLC
- Main IPC: H01L27/11531
- IPC: H01L27/11531 ; H01L27/11524 ; H01L27/11556 ; H01L27/11529 ; H01L27/1157 ; H01L23/522 ; H01L27/11573 ; H01L21/768 ; H01L23/528 ; H01L27/11582

Abstract:
Embodiments of three-dimensional (3D) memory devices having through array contacts (TACs) and methods for forming the same are disclosed. In an example, a method for forming a 3D memory device is disclosed. A dielectric stack including a plurality of dielectric/sacrificial layer pairs is formed on a substrate. A channel structure extending vertically through the dielectric stack is formed. A first opening extending vertically through the dielectric stack is formed. A spacer is formed on a sidewall of the first opening. A TAC extending vertically through the dielectric stack is formed by depositing a conductor layer in contact with the spacer in the first opening. A slit extending vertically through the dielectric stack is formed after forming the TAC. A memory stack including a plurality of conductor/dielectric layer pairs is formed on the substrate by replacing, through the slit, the sacrificial layers in the dielectric/sacrificial layer pairs with a plurality of conductor layers.
Public/Granted literature
- US20200066739A1 THREE-DIMENSIONAL MEMORY DEVICES HAVING THROUGH ARRAY CONTACTS AND METHODS FOR FORMING THE SAME Public/Granted day:2020-02-27
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