Invention Grant
- Patent Title: Semiconductor memory device and method for manufacturing same
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Application No.: US15691931Application Date: 2017-08-31
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Publication No.: US10566339B2Publication Date: 2020-02-18
- Inventor: Kotaro Fujii , Jun Fujiki , Shinya Arai
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: Toshiba Memory Coporation
- Current Assignee: Toshiba Memory Coporation
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L27/11565
- IPC: H01L27/11565 ; H01L27/1157 ; H01L27/11582

Abstract:
A semiconductor memory device includes a semiconductor substrate, a first insulating film provided above the semiconductor substrate, a first conductive film provided above the first insulating film, a plurality of first electrode films provided above the first conductive film and stacked to be separated from each other, a semiconductor member extending in a stacking direction of the plurality of first electrode films, and a charge storage member provided between the semiconductor member and one of the plurality of first electrode films. The first conductive film includes a main portion disposed at least below the plurality of first electrode films, and a fine line portion extending from the main portion toward an end surface side of the semiconductor substrate. A width of the fine line portion is narrower than a width of the main portion.
Public/Granted literature
- US20180247951A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME Public/Granted day:2018-08-30
Information query
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