Invention Grant
- Patent Title: Vertical-type memory device
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Application No.: US16108834Application Date: 2018-08-22
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Publication No.: US10566346B2Publication Date: 2020-02-18
- Inventor: Tak Lee , Su Bin Kang , Ji Mo Gu , Yu Jin Seo , Byoung Il Lee , Jun Ho Cha
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2018-0013479 20180202
- Main IPC: H01L27/11578
- IPC: H01L27/11578 ; H01L27/11582 ; H01L27/11568 ; H01L29/10 ; H01L29/423 ; H01L21/285 ; H01L27/11565 ; H01L21/02 ; H01L21/311 ; H01L21/28

Abstract:
A vertical-type memory device includes a substrate having a cell array region and a connection region disposed adjacent to the cell array region, a plurality of gate electrode layers stacked on the cell array region and the connection region, a plurality of channel structures disposed in the cell array region, a plurality of dummy channel structures disposed in the connection region, and a plurality of slits disposed in the plurality of gate electrode layers in the cell array region. The plurality of gate electrode layers forms a stepped structure in the connection region, the plurality of channel structures penetrates the plurality of gate electrode layers, and the plurality of dummy channel structures penetrates at least one of the plurality of gate electrode layers.
Public/Granted literature
- US20190244969A1 VERTICAL-TYPE MEMORY DEVICE Public/Granted day:2019-08-08
Information query
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