Invention Grant
- Patent Title: Method for crystallizing metal oxide semiconductor layer, semiconductor structure, active array substrate, and indium gallium zinc oxide crystal
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Application No.: US15837996Application Date: 2017-12-11
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Publication No.: US10566357B2Publication Date: 2020-02-18
- Inventor: Jia-Hong Ye , Ching-Liang Huang
- Applicant: AU OPTRONICS CORPORATION
- Applicant Address: TW Hsin-Chu
- Assignee: AU OPTRONICS CORPORATION
- Current Assignee: AU OPTRONICS CORPORATION
- Current Assignee Address: TW Hsin-Chu
- Agency: Locke Lord LLP
- Agent Tim Tingkang Xia, Esq.
- Priority: TW105141259A 20161213
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/786 ; H01L29/04 ; H01L21/02 ; H01L29/66

Abstract:
The present invention provides a method for crystallizing a metal oxide semiconductor layer, a semiconductor structure, a method for manufacturing a semiconductor structure, an active array substrate, and an indium gallium zinc oxide crystal. The crystallization method includes the following steps: forming an amorphous metal oxide semiconductor layer on a substrate; forming an oxide layer on the amorphous metal oxide semiconductor layer; forming an amorphous silicon layer on the oxide layer; and irradiating the amorphous silicon layer by using a laser, so as to heat the amorphous silicon layer, where the heated amorphous silicon layer heats the amorphous metal oxide semiconductor layer, so that the amorphous metal oxide semiconductor layer is converted into a crystallized metal oxide semiconductor layer.
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