Invention Grant
- Patent Title: Interconnect landing method for RRAM technology
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Application No.: US16108594Application Date: 2018-08-22
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Publication No.: US10566387B2Publication Date: 2020-02-18
- Inventor: Hsia-Wei Chen , Chih-Yang Chang , Chin-Chieh Yang , Jen-Sheng Yang , Kuo-Chi Tu , Wen-Ting Chu , Yu-Wen Liao
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L45/00 ; H01L27/105 ; H01L23/522 ; H01L23/528 ; H01L27/102

Abstract:
The present disclosure relates to a method of forming an integrated circuit. In some embodiments, the method may be performed by forming a lower interconnect structure within a first inter-level dielectric (ILD) layer over an upper surface of a substrate, and forming a resistive random access memory (RRAM) device over the lower interconnect structure. A second ILD layer is formed over the RRAM device. The second ILD layer is patterned to remove a part of the second ILD layer that defines a cavity. The cavity vertically extends from an upper surface of the second ILD layer to an upper surface of the RRAM device and laterally extends past opposing sidewalls of the RRAM device. An upper interconnect wire is formed within the cavity.
Public/Granted literature
- US20180374901A1 INTERCONNECT LANDING METHOD FOR RRAM TECHNOLOGY Public/Granted day:2018-12-27
Information query
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