Invention Grant
- Patent Title: Semiconductor device and manufacturing method thereof
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Application No.: US16210737Application Date: 2018-12-05
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Publication No.: US10566419B2Publication Date: 2020-02-18
- Inventor: Hae Chan Park , Jae Taek Kim
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si, Gyeonggi-do
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si, Gyeonggi-do
- Agency: William Park & Associates Ltd.
- Priority: KR10-2017-0097824 20170801
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L23/528 ; H01L27/11582 ; H01L27/24 ; H01L45/00 ; H01L27/11556 ; H01L27/11565 ; H01L21/28

Abstract:
A semiconductor device includes a stack structure located on a substrate and includes a first region, in which sacrificial layers and insulating layers are alternately stacked, and a second region, in which conductive layers and insulating layers are alternately stacked. The stack structure also includes a first slit insulating layer located at a boundary between the first region and the second region, wherein the first slit insulating layer penetrates the stack structure and extends in one direction. The stack structure further includes a plurality of slit insulating patterns located in the second region, wherein the plurality of slit insulating patterns penetrate the stack structure and are arranged along the one direction. At least one conductive layer among the conductive layers is bent between the first slit insulating layer and the slit insulating patterns.
Public/Granted literature
- US20190115425A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2019-04-18
Information query
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