Invention Grant
- Patent Title: Thin film transistor, method for fabricating the same, and OLED display panel
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Application No.: US15979635Application Date: 2018-05-15
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Publication No.: US10566456B2Publication Date: 2020-02-18
- Inventor: Feng Kang , Nini Bai , Liangliang Liu , Liang Tang
- Applicant: BOE Technology Group Co., Ltd. , Ordos Yuansheng Optoelectronics Co., Ltd.
- Applicant Address: CN Beijing CN Inner Mongolia
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.,ORDOS YUANSHENG OPTOELECTRONICS CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.,ORDOS YUANSHENG OPTOELECTRONICS CO., LTD.
- Current Assignee Address: CN Beijing CN Inner Mongolia
- Agency: Arent Fox LLP
- Agent Michael Fainberg
- Priority: CN201710602821 20170721
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L27/12 ; H01L29/66 ; H01L27/32

Abstract:
The disclosure discloses a thin film transistor, a method for fabricating the same, and an OLED display panel. The method for fabricating a thin film transistor includes: forming a poly-silicon layer and a gate insulation layer on a base substrate in that order; forming a pattern of a gate above the base substrate with the gate insulation layer in a patterning process; doping the base substrate with the pattern of the gate for the first time; forming a pattern of first photoresist on the base substrate doped for the first time, using a mask for forming the pattern of the gate, wherein the pattern of the first photoresist covers the pattern of the gate and an area for forming a lightly doped drain area; and doping the base substrate with the pattern of the first photoresist for the second time to form a pattern of an active layer.
Public/Granted literature
- US20190027611A1 THIN FILM TRANSISTOR, METHOD FOR FABRICATING THE SAME, AND OLED DISPLAY PANEL Public/Granted day:2019-01-24
Information query
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