Invention Grant
- Patent Title: Optical sensor and manufacturing method thereof
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Application No.: US15713012Application Date: 2017-09-22
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Publication No.: US10566476B2Publication Date: 2020-02-18
- Inventor: Teng-Chien Yu , Sheng-Fu Lin , Ming-Sheng Yang
- Applicant: Personal Genomics, Inc.
- Applicant Address: KY Grand Cayman
- Assignee: PERSONAL GENOMICS, INC.
- Current Assignee: PERSONAL GENOMICS, INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Main IPC: H01L31/0232
- IPC: H01L31/0232 ; G01N21/64 ; G01N21/77 ; G02B6/122 ; G02B6/30 ; B82Y20/00

Abstract:
Some embodiments of the present disclosure provide an optical sensor. The optical sensor includes a semiconductive substrate; a light sensing region on the semiconductive substrate; a waveguide region configured to guide light from a wave insert portion through a waveguide portion and to a sample holding portion; and an interconnect region below the waveguide region, and the interconnect region being disposed above the light sensing region. The waveguide portion includes a first dielectric layer comprising a first refractive index and at least one second dielectric layer comprising a second refractive index, wherein the second refractive index is smaller than the first refractive index.
Public/Granted literature
- US20180013017A1 OPTICAL SENSOR AND MANUFACTURING METHOD THEREOF Public/Granted day:2018-01-11
Information query
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