Invention Grant
- Patent Title: Micro-LED transfer method and manufacturing method
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Application No.: US16064917Application Date: 2015-12-23
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Publication No.: US10566494B2Publication Date: 2020-02-18
- Inventor: Quanbo Zou
- Applicant: Goertek Inc.
- Applicant Address: CN Shandong
- Assignee: Goertek Inc.
- Current Assignee: Goertek Inc.
- Current Assignee Address: CN Shandong
- Agency: Alston & Bird LLP
- International Application: PCT/CN2015/098429 WO 20151223
- International Announcement: WO2017/107097 WO 20170629
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L33/00 ; H01L25/075 ; H01L21/683 ; H01L23/00 ; H01L33/48

Abstract:
A micro-LED transfer method and a manufacturing method are disclosed. The micro-LED transfer method comprises: coating a sacrificial layer on a carrier substrate, wherein micro-LEDs are bonded on the carrier substrate through a first bonding layer (S1100); patterning the sacrificial layer to expose micro-LEDs to be picked up (S1200); bonding the micro-LEDs to be picked up with a pickup substrate through a second bonding layer (S1300); removing the sacrificial layer by undercutting (S1400); lifting-off the micro-LEDs to be picked up from the carrier substrate (S1500); bonding the micro-LEDs on the pickup substrate with a receiving substrate through a third bonding layer (S1600); and lifting-off the micro-LEDs from the pickup substrate (S1700).
Public/Granted literature
- US20180374987A1 MICRO-LED TRANSFER METHOD AND MANUFACTURING METHOD Public/Granted day:2018-12-27
Information query
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