Invention Grant
- Patent Title: Composite substrate and thickness-tendency estimating method for piezoelectric substrate
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Application No.: US15443023Application Date: 2017-02-27
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Publication No.: US10566518B2Publication Date: 2020-02-18
- Inventor: Tomoki Nagae , Ayato Koizumi
- Applicant: NGK INSULATORS, LTD.
- Applicant Address: JP Nagoya
- Assignee: NGK Insulators, Ltd.
- Current Assignee: NGK Insulators, Ltd.
- Current Assignee Address: JP Nagoya
- Agency: Burr & Brown, PLLC
- Priority: JP2015-181763 20150915
- Main IPC: H01L41/337
- IPC: H01L41/337 ; H01L41/08

Abstract:
A composite substrate according to the present invention includes a support substrate having a diameter of 2 inches or more, and a piezoelectric substrate having a thickness of 20 μm or less and bonded to the support substrate to transmit light. The piezoelectric substrate has a thickness distribution shaped like a fringe. A waveform having an amplitude within a range of 5 to 100 nm in a thickness direction and a pitch within a range of 0.5 to 20 mm in a width direction appears in the thickness distribution of the piezoelectric substrate in a cross section of the composite substrate taken along a line orthogonal to the fringe, and the pitch of the waveform correlates with a width of the fringe. In the piezoelectric substrate, the fringe may include either parallel fringes or spiral or concentric fringes.
Public/Granted literature
- US20170170385A1 COMPOSITE SUBSTRATE AND THICKNESS-TENDENCY ESTIMATING METHOD FOR PIEZOELECTRIC SUBSTRATE Public/Granted day:2017-06-15
Information query
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