Invention Grant
- Patent Title: Carbon nanotube-graphene hybrid transparent conductor and field effect transistor
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Application No.: US14820039Application Date: 2015-08-06
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Publication No.: US10566537B2Publication Date: 2020-02-18
- Inventor: Ageeth A. Bol , Bhupesh Chandra , Amal Kasry , Ahmed Maarouf , Glenn J. Martyna , George S. Tulevski
- Applicant: International Business Machines Corporation , Egypt Nanotechnology Center
- Applicant Address: US NY Armonk EG Cairo
- Assignee: International Business Machines Corporation,Egypt Nanotechnology Center
- Current Assignee: International Business Machines Corporation,Egypt Nanotechnology Center
- Current Assignee Address: US NY Armonk EG Cairo
- Agency: Ryan, Mason & Lewis, LLP
- Main IPC: B32B9/00
- IPC: B32B9/00 ; H01L51/00 ; H01L51/05 ; C01B32/158 ; C01B32/182 ; C01B32/186 ; C01B32/192 ; B82Y10/00 ; B82Y40/00 ; C23C16/26 ; H01B1/04 ; H01L51/10 ; H01L29/16 ; H01L29/778 ; H01L29/66 ; H01L29/786 ; B82Y30/00 ; H01L29/06
Abstract:
A nanotube-graphene hybrid film and method for forming a cleaned nanotube-graphene hybrid film. The nanotube-graphene hybrid film includes a substrate; nanotube film deposited over the substrate to produce a layer of nanotube film; and graphene deposited over the layer of nanotube film to produce a nanotube-graphene hybrid film.
Public/Granted literature
- US20150348667A1 Carbon Nanotube-Graphene Hybrid Transparent Conductor and Field Effect Transistor Public/Granted day:2015-12-03
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