Invention Grant
- Patent Title: Methods of fault detection for multiplexed heater array
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Application No.: US14290542Application Date: 2014-05-29
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Publication No.: US10568163B2Publication Date: 2020-02-18
- Inventor: Harmeet Singh
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: LAM RESEARCH CORPORATION
- Current Assignee: LAM RESEARCH CORPORATION
- Current Assignee Address: US CA Fremont
- Main IPC: H05B3/68
- IPC: H05B3/68 ; H05B3/02 ; H05B1/02 ; H01L21/67
Abstract:
Described herein is a method of detecting fault conditions in a multiplexed multi-heater-zone heating plate for a substrate support assembly used to support a semiconductor substrate in a semiconductor processing apparatus.
Public/Granted literature
- US20140263274A1 METHODS OF FAULT DETECTION FOR MULTIPLEXED HEATER ARRAY Public/Granted day:2014-09-18
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