Invention Grant
- Patent Title: System and method for pumping laser sustained plasma with a frequency converted illumination source
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Application No.: US16051559Application Date: 2018-08-01
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Publication No.: US10568195B2Publication Date: 2020-02-18
- Inventor: Ilya Bezel , Anatoly Shchemelinin , Matthew Derstine
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: H05H1/02
- IPC: H05H1/02 ; H01S3/00 ; H01S3/16 ; H05G2/00 ; G02F1/37 ; H01S3/11 ; G02F1/35 ; H01S3/06 ; H01S3/067

Abstract:
A system for generating pump illumination for laser sustained plasma (LSP) is disclosed. In embodiments, the system includes an illumination source configured to output illumination having a first spectral frequency and an optical frequency converter. The optical frequency converter can be configured to receive the illumination having the first spectral frequency from the illumination source and configured to output pump illumination having a second spectral frequency that is different from the first spectral frequency.
Public/Granted literature
- US20190373709A1 System and Method for Pumping Laser Sustained Plasma with a Frequency Converted Illumination Source Public/Granted day:2019-12-05
Information query
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