Invention Grant
- Patent Title: Platen rotation system and method
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Application No.: US15626597Application Date: 2017-06-19
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Publication No.: US10576606B2Publication Date: 2020-03-03
- Inventor: Bruce Cho , Chia-Ying Tien , Huang-Chu Ko
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Hauptman Ham, LLP
- Main IPC: B24B47/12
- IPC: B24B47/12 ; B24B37/005 ; B24B37/10 ; H01L21/321

Abstract:
A platen rotation apparatus includes a rotator assembly coupled with a platen. The rotator assembly operates in a first mode to increase a rotational kinetic energy of the platen based on an electrical energy input, and, in a second mode, to decrease the rotational kinetic energy of the platen and generate an electrical energy output based on the decreased rotational kinetic energy of the platen. An energy storage device electrically coupled with the rotator assembly provides the electrical energy input when the rotator assembly is in the first mode and receives the electrical energy output when the rotator assembly is in the second mode.
Public/Granted literature
- US20180361535A1 PLATEN ROTATION SYSTEM AND METHOD Public/Granted day:2018-12-20
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