Invention Grant
- Patent Title: Systems for selectively feeding chunk polysilicon or granular polysilicon in a crystal growth chamber
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Application No.: US16352033Application Date: 2019-03-13
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Publication No.: US10577717B2Publication Date: 2020-03-03
- Inventor: Seok Min Yun , Seong Su Park , Jun Hwan Ji , Won-Jin Choi , UiSung Jung , Young Jung Lee , Tae Su Koo , Sung-Jin Kim
- Applicant: GlobalWafers Co., Ltd.
- Applicant Address: TW
- Assignee: GLOBALWAFERS CO., LTD.
- Current Assignee: GLOBALWAFERS CO., LTD.
- Current Assignee Address: TW
- Agency: Armstrong Teasdale LLP
- Main IPC: C30B15/02
- IPC: C30B15/02 ; C30B29/06 ; C30B15/20 ; C30B15/32 ; C30B30/04 ; C30B35/00 ; B64G1/58 ; B64G1/64 ; B66D1/12 ; G01S11/02 ; G01S19/13 ; B64G1/10 ; G01P15/18

Abstract:
A feed assembly supplies polysilicon to a growth chamber for growing a crystal ingot from a melt. An example system includes a housing having support rails for receiving one of a granular tray and a chunk tray and a feed material reservoir positioned above the support rails to selectively feed one of either the granular tray or the chunk tray. A valve mechanism and pulse vibrator are also disclosed.
Public/Granted literature
- US20190211469A1 SYSTEMS FOR SELECTIVELY FEEDING CHUNK POLYSILICON OR GRANULAR POLYSILICON IN A CRYSTAL GROWTH CHAMBER Public/Granted day:2019-07-11
Information query
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