A medical fluid delivery device includes a process fluid body including first and second sides defining a first process fluid inlet valve seat and a first process fluid outlet valve seat and a second process fluid inlet valve seat and a second process fluid outlet valve seat; a first motive fluid plate defining a first aligned motive fluid inlet valve actuation area and a first aligned motive fluid outlet valve actuation area; and a second motive fluid plate defining a second aligned motive fluid inlet valve actuation area and a second aligned motive fluid outlet valve actuation area. The device further includes a first inlet valve diaphragm disposed between the first motive fluid inlet valve actuation area and the first process fluid inlet valve seat; and a first outlet valve diaphragm disposed between the first motive fluid outlet valve actuation area and the first process fluid outlet valve seat.