- Patent Title: Vacuum pump and abnormality cause estimating method for vacuum pump
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Application No.: US15521793Application Date: 2015-11-05
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Publication No.: US10578158B2Publication Date: 2020-03-03
- Inventor: Yoshinobu Ohtachi , Yasushi Maejima , Tsutomu Takaada , Manabu Nonaka
- Applicant: Edwards Japan Limited
- Applicant Address: JP Chiba
- Assignee: Edwards Japan Limited
- Current Assignee: Edwards Japan Limited
- Current Assignee Address: JP Chiba
- Agency: Westman, Champlin & Koehler, P.A.
- Agent Theodore M. Magee
- Priority: JP2014-230163 20141112
- International Application: PCT/JP2015/081147 WO 20151105
- International Announcement: WO2016/076191 WO 20160519
- Main IPC: F16C32/04
- IPC: F16C32/04 ; F04D19/04 ; F04D27/02 ; F01D17/16 ; F04D27/00 ; F01D17/02 ; F01D21/00 ; F04D29/058

Abstract:
Provided are a vacuum pump and a method for the vacuum pump in which, when contact between a rotating body and a stator is sensed, the cause of the contact can be analyzed. Contact determination is made using a threshold for rotating body contact determination for a displacement signal and a threshold for rotating body contact determination for an acceleration signal. The amount of unbalance of a rotating body is determined using a threshold for amount-of-unbalance increase determination for the displacement signal and a threshold for amount-of-unbalance increase determination for the acceleration signal. When, in one of the displacement signal and the acceleration signal, the threshold for amount-of-unbalance increase determination or the threshold for amount-of-unbalance increase determination is exceeded within a predetermined time before determination of an estimated time point of contact, the contact is determined not to be caused by an increase in accumulation of products.
Public/Granted literature
- US20170248166A1 VACUUM PUMP AND ABNORMALITY CAUSE ESTIMATING METHOD FOR VACUUM PUMP Public/Granted day:2017-08-31
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