Invention Grant
- Patent Title: Projection optical system, exposure apparatus, and article manufacturing method
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Application No.: US16051937Application Date: 2018-08-01
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Publication No.: US10578846B2Publication Date: 2020-03-03
- Inventor: Michio Kono , Kiyoshi Fukami , Ryosuke Fukuoka
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2016-203033 20161014
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02B17/08

Abstract:
The present invention provides a projection optical system including a first concave reflecting surface, a first convex reflecting surface, a second concave reflecting surface, and a third concave reflecting surface, wherein the first concave reflecting surface, the first convex reflecting surface, the second concave reflecting surface, and the third concave reflecting surface are arranged such that light from an object plane forms an image on an image plane by being reflected by the first concave reflecting surface, the first convex reflecting surface, the second concave reflecting surface, the first convex reflecting surface, and the third concave reflecting surface in an order named.
Public/Granted literature
- US20180341093A1 PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND ARTICLE MANUFACTURING METHOD Public/Granted day:2018-11-29
Information query
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