Invention Grant
- Patent Title: Self-supporting film, self-supporting structure, method for manufacturing self-supporting film, and pellicle
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Application No.: US15218837Application Date: 2016-07-25
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Publication No.: US10578962B2Publication Date: 2020-03-03
- Inventor: Seitaro Doi , Kenichiro Iwamura , Takuji Namatame
- Applicant: ASAHI KASEI E-MATERIALS CORPORATION
- Applicant Address: JP Tokyo
- Assignee: ASAHI KASEI E-MATERIALS CORPORATION
- Current Assignee: ASAHI KASEI E-MATERIALS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2010-092058 20100413; JP2010-092459 20100413
- Main IPC: G03F1/64
- IPC: G03F1/64 ; G02B1/118 ; G03F1/62

Abstract:
Provided is a self-supporting film that has an anti-reflection function independently, so that the self-supporting film exhibits excellent optical characteristics as a result. A self-supporting film has a rugged-structure layer having periodic rugged shapes formed on a surface thereof, with these periodic rugged shapes being formed on at least one surface. The average thickness of the self-supporting film ranges from 0.2 μm to 20.0 μm. The rugged-structure layer has a yield strain of 1% or greater and a tensile elongation of 10% or greater.
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