Invention Grant
- Patent Title: EUV collector for use in an EUV projection exposure apparatus
-
Application No.: US16136453Application Date: 2018-09-20
-
Publication No.: US10578972B2Publication Date: 2020-03-03
- Inventor: Holger Kierey , Johannes Zellner
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102016205893 20160408
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G02B5/08 ; G02B5/18 ; G03F7/20 ; G02B19/00

Abstract:
An EUV collector serves for use in an EUV projection exposure apparatus. The collector guides EUV used light emitted by a plasma source region. An overall impingement surface of the collector is impinged upon by radiation emitted by the plasma source region. A used light portion of the overall impingement surface guides the EUV used light. An extraneous light portion of the overall impingement surface is impinged upon by extraneous light radiation, the wavelength of which differs from that of the used light. The used light portion and the extraneous light portion are not congruent. This EUV collector has increased efficiency can involve reduced production costs.
Public/Granted literature
- US20190033723A1 EUV COLLECTOR FOR USE IN AN EUV PROJECTION EXPOSURE APPARATUS Public/Granted day:2019-01-31
Information query