Invention Grant
- Patent Title: Ion pump shield
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Application No.: US15665266Application Date: 2017-07-31
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Publication No.: US10580629B2Publication Date: 2020-03-03
- Inventor: Cristian Maccarrone , Chiara Paolini, Jr. , Enrica Carbonero , Paolo Manassero
- Applicant: Agilent Technologies, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Agilent Technologies, Inc.
- Current Assignee: Agilent Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: F04B37/02
- IPC: F04B37/02 ; H01J41/12

Abstract:
An ion pump with a housing enclosing an interior, a gas inlet having a through-hole extending into the interior of the ion pump, at least one cathode, at least one anode positioned in proximity to the at least one cathode, a magnet disposed on an opposite side of the at least one cathode from the anode, and a blocking shield disposed between the gas inlet and the at least one cathode. The blocking shield is electrically connected to the at least one anode. An associated method installs the blocking shield by inserting components of the blocking shield assembly through the gas inlet, and assembling (inside the interior of the ion pump) the inserted components to form the blocking shield.
Public/Granted literature
- US20190035613A1 ION PUMP SHIELD Public/Granted day:2019-01-31
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